Microcomb design and fabrication for high accuracy optical assembly

There are two popular optic designs for x-ray space telescopes: the traditional monolithic design, which has demonstrated subarcsecond resolution but at enormous weight and cost per collecting area, and the foil design, which has achieved far greater collecting area per weight and cost, but with resolution limited to the arcminute level, in part due to foil assembly inaccuracy. In this article, we present the design and the fabrication of a novel micromechanical device, the so-called microcomb, which is used to assemble high-accuracy foil x-ray optics. To achieve submicron foil alignment accuracy, two types of microcombs have been fabricated via microelectromechanical systems technology. Reference combs provide highly accurate single-point contacts against which foils are registered, and spring combs provide the mechanical actuation needed to properly position and shape the foils. Briefly, we introduce some basic concepts regarding grazing-incidence x-ray optics. We then present a theoretical model that has given rise to the unique shape of the spring microcomb. Finally, the fabrication process used to produce the microcombs is discussed. © 2000 American Vacuum Society. @S0734-211X~00!01606-1#